Plasma Equipment Senior Engineer

Technical Expertise (Plasma Etch)

• Strong knowledge of plasma etch systems (RF gen, ESC, Wafer backside gas cooling system)
• Understanding theory of plasma creation
• Hands-on chamber full wet clean, lifter pin motor assy replacement / servicing, robot change, slip valve change …..etc
• Strong capability to troubleshoot ultra low particle count and ICPMS.

Equipment Performance & Reliability

• Perform preventive maintenance (PM) and corrective maintenance (CM)
• Troubleshoot equipment failures and minimize downtime
• Ensure machines meet operational and safety standards
• Manage spare parts and critical component tracking
• Balance PM tool time with manufacturing
• May require on-call support for critical situation

Process Support & Optimization

• Support production by ensuring stable processes
• Work closely with process engineers to optimize tool parameters
• Monitor tool performance using SPC (Statistical Process Control)
• Drive improvements in yield and defect reduction

Troubleshooting & Problem Solving

• Conduct root cause analysis (RCA) for equipment and process issues
• Apply structured problem-solving methods (e.g., 8D, Fishbone, FMEA)
• Implement corrective actions and preventive actions (CAPA)

Continuous Improvement

• Lead or participate in productivity and cost-reduction projects
• Improve Mean Time Between Failures (MTBF) and Mean Time To Repair (MTTR)
• Enhance equipment efficiency and automation

Installation & Qualification

• Support new equipment installation, setup, and acceptance (SAT/FAT)
• Perform equipment qualification and process buy-off
• Collaborate with vendors for upgrades and modifications

Documentation & Reporting

• Maintain accurate maintenance records and technical documentation
• Prepare reports on equipment performance, downtime, and improvements
• Update SOPs and work instructions

Safety & Sustainability

• Ensure compliance with fab safety protocols and cleanroom standards
• Handle high-voltage systems, vacuum systems, and hazardous gases safely
• Balance equipment sustainability vs needs

Key Performance Indicators

• Equipment uptime (%)
• OEE
• Yield impact
• PM compliance rate
• FDC trigger rate

Soft Skills

• Strong analytical and problem-solving skills
• Ability to work under pressure in a high-volume manufacturing environment
• Good communication and teamwork
• Proactive and self-driven mindset
• Utilizing goggle office & Gemini AI