Member of Technical Staff Equipment Engineer, CMP (JR13698)

Job Summary

The CMP Equipment Engineer is responsible for ensuring the optimal performance, reliability, and stability of Chemical Mechanical Planarization (CMP) production equipment. This role supports daily fab operations, equipment troubleshooting, preventive maintenance, installation and commissioning, and continuous improvement initiatives to maintain process stability, product quality, high equipment utilization, and efficient industrialization.

Key Responsibilities

• Monitor CMP equipment performance and analyze tool data to identify abnormalities, root causes, and corrective actions.
• Lead equipment troubleshooting, fault isolation, and rapid response to tool issues to minimize downtime and maintain stable production.
• Perform daily inspections, preventive maintenance, and corrective maintenance on CMP tools to ensure high stability and availability.
• Support defect and excursion investigations, including escalation of critical issues and coordination of material review activities when required.
• Collaborate with process, quality, production, facilities, and supplier teams to improve equipment performance, tool reliability, and line stability.
• Support new equipment evaluation, installation, qualification, and industrialization activities to ensure smooth equipment setup and process deployment.
• Coordinate with facilities engineering teams and suppliers during hook-up, installation, and commissioning activities.
• Drive equipment performance optimization, including hardware capability upgrades and OEE improvement initiatives.
• Set up, optimize, and maintain equipment monitoring systems, automation solutions, and defect-related databases or libraries.
• Develop and maintain equipment SOPs, preventive maintenance procedures, operation standards, and fault resolution documentation.
• Design and deliver training for manufacturing operators to improve line competency and equipment handling.
• Manage spare parts and consumables inventory, including demand forecasting and stock planning to ensure availability within budget.
• Ensure all equipment operations and maintenance activities comply with quality management systems, ISO standards, safety regulations, and cleanroom requirements.
• Participate in continuous improvement, technology transfer, and industrialization activities to support operational excellence.
• Support advanced monitoring and analytics initiatives, including data-driven problem solving and automation-based improvement projects.

Job Requirement

• Bachelor’s degree or above in Mechanical Engineering, Mechatronics, Automation, Electrical Engineering, Electronics, Materials Science, Chemical Engineering, or a related STEM field.
• Prior experience in CMP equipment engineering is highly preferred; experience with AMAT Mirra, Ebara Flex, Momentum, HWATSING, or similar mainstream CMP tools is an advantage.
• Solid understanding of semiconductor manufacturing principles, CMP fundamentals, and equipment maintenance practices.
• Ability to read and interpret electrical schematics, pneumatic diagrams, and mechanical drawings.
• Familiarity with CMP process flows and the ability to adjust equipment parameters based on process requirements.
• Capability to analyze wafer surface defects such as scratches and residues, as well as material removal rate performance.
• Proficiency with CMP equipment control interfaces and software; hands-on experience with robotic automation components and related maintenance.
• Strong data analysis capability; experience with data analysis tools is a plus.
• Strong hands-on ability and willingness to work in a cleanroom environment.
• Excellent communication, coordination, and teamwork skills.
• Systematic logical thinking and structured problem-solving ability.
• Flexibility to work shift schedules to support 24/7 continuous production operations.